Under-floor charging station

ABSTRACT

An under-floor charging station can be mounted under a floor such that a top plate of the under-floor charging station is substantially flush with a top surface of the floor without touching the ground. Openings in the top plate allow charging elements to extend when in use to charge a mobile robot, and to retract under the floor when not in use. The retractable charging elements prevent tripping hazards and allow the mobile robot to move freely throughout a clean room. Moreover, because the charging elements can be retracted in an unobtrusive position when the under-floor charging station is not in use, the under-floor charging station is permitted to be positioned in locations in the clean room that allow the mobile robot to continue working while charging and/or allow non-stop running of the mobile robot.

RELATED APPLICATION

This application is a continuation of U.S. patent application Ser. No.16/887,651, filed May 29, 2020, which is incorporated herein byreference in its entirety.

BACKGROUND

As demand for electronic devices increases, semiconductor devicemanufactures may continue to seek out ways of automating tasks in orderto reduce costs and increase productivity. In some cases, the movementof wafers or semiconductor dies within a clean room can be at leastpartially automated through the use of mobile robots or other mobiletransport mechanisms. In these cases, a mobile robot may transportwafers and/or dies between various semiconductor process equipment asthe wafers and/or dies move through manufacturing.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIGS. 1A-1G are diagrams of an example under-floor charging stationdescribed herein.

FIGS. 2A-2G are diagrams of one or more example implementationsdescribed herein.

FIG. 3 is a diagram of an example environment in which systems and/ormethods described herein may be implemented.

FIG. 4 is a diagram of example components of one or more devices ofFIGS. 1A-1G and/or 2A-2G.

FIGS. 5-7 are flowcharts of example processes for charging a mobilerobot.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

A mobile robot can travel in a clean room to transport wafer containersand/or die containers throughout the clean room. The mobile robot mayoperate on battery, which permits the mobile robot to travel freelywithout being attached to a power cable. However, the battery will drainafter prolonged use and, thus, the mobile robot will have to stopworking and recharge.

Charging stations for a mobile robot can be placed throughout the cleanroom so that the mobile robot can charge at various locations in theclean room. However, some charging station designs have certaindrawbacks. For example, some charging stations have charging rods orcharging pads that protrude from the clean room floor. These protrudingcharging rods or charging pads may cause tripping hazards for clean roompersonnel, may interrupt the path of travel of the mobile robot, and maycause other issues. As another example, some charging stations areplaced in the clean room in a manner which results in the mobile robotstopping productivity after a time period (e.g., 5 hours) in order tocharge while idle (e.g., for an hour or more). The idle charging periodresults in decreased productivity of the mobile robot, decreasedthroughput for semiconductor processing in the clean room, and/or thelike.

Some implementations described herein provide an under-floor chargingstation that can be mounted beneath a raised clean room floor such thata top plate of the under-floor charging station is substantially flushwith the raised clean room floor without touching the ground. Openingsin the top plate of the under-floor charging station allow chargingelements (e.g., charging rods, charging pads, and/or other types ofcharging elements) to extend when in use to charge a mobile robot, andto retract under the raised clean room floor when not in use.

In this way, the retractable charging elements of the under-floorcharging station prevent tripping hazards and allow the mobile robot tomove freely throughout the clean room. In particular, the mobile robotcan travel over the under-floor charging station without the under-floor charging station interfering with the mobile robot's path oftravel. This allows the mobile robot to travel in a more direct path,which reduces the complexity in programming the path of travel of themobile robot and allows the path of travel of the mobile robot to bemore optimized. Moreover, because the charging elements can be retractedin an unobtrusive position when the under-floor charging station is notin use, the under-floor charging station is permitted to be positionedin locations in the clean room that allow the mobile robot to continueworking while charging and/or allow non-stop running of the mobilerobot. For example, the under-floor charging station may be positionednear wafer racks, loading ports of semiconductor processing equipment,and/or the like such that the mobile robot can charge while loading andunloading wafer/die containers.

FIGS. 1A-1G are diagrams of an example charging station 100 describedherein. In some implementations, charging station 100 is a chargingstation for charging a battery of a mobile robot. In someimplementations, charging station may be a charging station for chargingother types of mobile devices that operate on battery power.

FIG. 1A shows a perspective view of charging station 100. As shown inFIG. 1A, charging station 100 may be mounted under a floor 102. In thesecases, charging station 100 may be referred to as an under-floorcharging station. In some implementations, floor 102 is a raised floor(e.g., in a semiconductor processing clean room, in a data center, oranother type of facility having a raised floor relative to a ground orlower floor on which the raised floor is constructed) composed of aplurality of rails and floor tiles. In some implementations, floor 102is a non-raised floor, and charging station 100 may be mounted in acavity under the non-raised floor.

As further shown in FIG. 1A, charging station 100 may include aplurality of mounting brackets 104 to mount charging station 100 tofloor 102 (e.g., to one or more rails of floor 102). Mounting brackets104 may include various types and shapes of mounting brackets, such asL-shaped brackets, plate brackets, and/or other types of mountingbrackets that are capable of sliding along one or more rails of floor102 to permit horizontal adjustment of charging station 100. Chargingstation 100 may further include a plurality of support members 106 thatconnect and/or removably attach to mounting brackets 104. Supportmembers 106 may include rails, tubes, or other types of support membersthat permit charging station 100 to horizontally translate in a planethat is parallel to floor 102. For example, charging station 100 mayinclude one or more first support members 106 a that permit chargingstation 100 to horizontally translate along a first axis (e.g., an Xaxis) in the plane that is parallel to floor 102, and may include one ormore first support members 106 b that permit charging station 100 tohorizontally translate along a second axis (e.g., a Y axis) in the planethat is parallel to floor 102. First support member(s) 106 a and secondsupport member(s) 106 b may be perpendicular or orthogonal such that thefirst axis and the second axis are also perpendicular or orthogonal. Inthis way, support members 106 permit the position of charging station100 to be laterally adjusted within the space of a floor tile opening offloor 102.

As further shown in FIG. 1A, charging station 100 may include a bottomplate 108, a middle plate 110, and a top plate 112. Bottom plate 108,middle plate 110, and top plate 112 may be formed of various shapes,sizes, and/or materials (e.g., plastics, metals, and/or the like), andmay also be referred to as trays or other types of substantially flatand planar structures. Bottom plate 108 may connect and/or removablyattach to first support member(s) 106 a and/or second support member(s)106 b such that the position of bottom plate 108, middle plate 110, andtop plate 112 may be adjusted by sliding bottom plate 108, middle plate110, and top plate 112 along first support member(s) 106a and/or secondsupport member(s) 106 b.

Top plate 112 may be connected and/or removably mounted onto bottomplate 108 by one or more mounting brackets or other mounting mechanisms.Top plate 112 may be connected and/or removably mounted onto bottomplate 108 such that a top surface 114 of floor 102 and a top surface 116of top plate 112 are substantially even and/or flush to reduce and/orminimize tripping hazards and to permit a mobile robot and other mobiledevices to travel over charging station 100. Middle plate 110 may bepositioned between bottom plate 108 and top plate 112.

Middle plate 110 may be connected to bottom plate 108 in a manner thatpermits the height of middle plate 110 to be adjusted (e.g., along a Zaxis or vertical axis) relative to bottom plate 108 and top plate 112.Charging station 100 may include a motor 118 to adjust the height ofmiddle plate 110 relative to bottom plate 108 and top plate 112. Motor118 may include various types of motors, such as a permeant magnetdirect current (DC) motor, a shunt DC motor, a series DC motor, aservomotor, a brushed or brushless motor, an induction alternatingcurrent (AC) motor, and/or the like.

FIG. 1B shows a side view of charging station 100. As shown in FIG. 1B,charging station 100 may include one or more brackets 120. Brackets 120may be used to connect support member(s) 106 a and support member(s) 106b in a manner that permits support member(s) 106 a to slide relative tosupport member(s) 106 b and/or that permits support member(s) 106 b toslide relative to support member(s) 106 a. As further shown in FIG. 1B,charging station 100 may include a plurality of support members 122 thatare connected and/or removably mounted to bottom plate 108. Supportmembers 122 may be rods, tubes, rails and/or other types of elongatedmembers that are positioned substantially perpendicular to bottom plate108, middle plate 110, and top plate 112. Middle plate 110 may slidealong support members 122 in a manner that changes the height and/or thevertical position (e.g., along a Z axis or vertical axis) of middleplate 110 relative to bottom plate 108 and top plate 112. Middle plate110 may be slidably interfaced with support members 122 by a pluralityof friction rings 124 that are removably attached to middle plate 110.Friction rings 124 may include linear bearings, plastic or polymercylindrical sleeves, or other types of components that reduce frictionand/or decrease wear as middle plate 110 slides along support members122.

As further shown in FIG. 1B, charging station 100 may include one ormore charging elements 126 on middle plate 110. In some implementations,charging element(s) 126 may be connected and/or removably or irremovablymounted on middle plate 110. Accordingly, movement of middle plate 110along support members 122 may change the height and/or the verticalposition of charging element(s) 126 along with the height and/or thevertical position of middle plate 110. In this way, middle plate 110 mayslide along support members 122 to extend at least a portion of chargingelement(s) 126 above top surface 114 of floor 102 and/or to retractcharging element(s) 126 below or even with top surface 114 of floor 102.

Charging element(s) 126 may include charging rods, charging pads,charging prongs, or other types of structures that may be used to chargea mobile robot. Charging element(s) 126 may extend upward toward topplate 112 and may be formed of various conductive materials, such ascopper, gold, silver, and/or the like, to carry an electrical current.The quantity, size, shape, and/or configuration of charging element(s)126 illustrated in FIGS. 1A-1G are provide as an example only and, inpractice, may be based on the mobile robot and other mobile devices thatare to be charged by charging station 100.

As further shown in FIG. 1B, charging station 100 may include variousmeans for adjusting the height and/or the vertical position of middleplate 110 (and thus, the height and/or the vertical position of chargingelement(s) 126). For example, charging station 100 may include linkage128 and a turning member 130. Linkage 128 may mechanically connect motor118 to turning member 130. Linkage 128 may include various gears,shafts, and/or other types of mechanical components that transferrotational motion of motor 118 to rotational motion of turning member130. Turning member 130 may be a threaded rod or threaded shaft thatrotates to adjust the height and/or the vertical position of middleplate 110 (and thus, the height and/or the vertical position of chargingelement(s) 126).

As further shown in FIG. 1B, charging station 100 may include aplurality of sensors 138. Sensors 138 may be position sensors fordetecting the height or the vertical position (e.g., along the Z axis)of middle plate 110. Sensors 138 may include proximity sensors,photodetectors, Hall effect sensors, reflective fibro sensors, linearvariable differential transformers (LVDTs), and/or other types ofsensors that are capable of detecting the height or the verticalposition of middle plate 110, that are capable of generating sensorinformation or sensor data based on the height or the vertical positionof middle plate 110, and/or the like.

In some implementations, each of sensors 138 may be positioned and/orotherwise configured to detect and/or generate sensor information basedon a particular height or vertical position of middle plate 110. Forexample, sensor 138 a may be positioned and/or otherwise configured todetect an upper position limit of middle plate 110, to generate sensorinformation based on an upper position limit of middle plate 110, and/orthe like. The upper position limit may correspond to the maximumpermitted height or vertical position of middle plate 110. As anotherexample, sensor 138 b may be positioned and/or otherwise configured todetect a charging position of middle plate 110, generate sensorinformation based on a charging position of middle plate, and/or thelike. The charging position may be a particular height, height range,vertical position, or vertical position range of middle plate 110 atwhich at least a portion of charging element(s) 126 are extended abovetop surface 114 of floor 102 to permit charging of a mobile robot.

As another example, sensor 138 c may be positioned and/or otherwiseconfigured to detect a stored position of middle plate 110, generatesensor information based on a stored position of middle plate 110,and/or the like. The stored position may be a particular height, heightrange, vertical position, or vertical position range of middle plate 110at which charging element(s) 126 are retracted below or even with topsurface 114 of floor 102 such that charging element(s) 126 are not atripping hazard and do not interfere with travel of a mobile robot. Asanother example, sensor 138 d may be positioned and/or otherwiseconfigured to detect a lower position limit of middle plate 110, togenerate sensor information based on a lower position limit of middleplate 110, and/or the like. The lower position limit may correspond tothe minimum permitted height or vertical position of middle plate 110.

As further shown in FIG. 1B, charging station 100 may include one ormore sensors 140. Sensor(s) 140 may be mounted and/or removably attachedto bottom plate 108, for example, by brackets 142. Sensor(s) 140 may beconfigured to detect motion near charging station 100, may be configuredto generate sensor information associated with a horizontal position orlateral position (e.g., a horizontal position or lateral position alongan X axis and a Y axis) of a mobile robot, and/or the like. Sensor(s)140 may include proximity sensors, photodetectors, Hall effect sensors,reflective fibro sensors, LVDTs, and/or other types of sensors that arecapable of detecting motion near charging station 100, that are capableof generating sensor information or sensor data associated with ahorizontal position or lateral position of a mobile robot, and/or thelike.

As further shown in FIG. 1B, charging station 100 may include acontroller housing 144. Controller housing 144 may include a metalhousing, a plastic housing, or another type of housing configured toprotect various electrical and electromechanical components included incharging station 100, such as a controller, various types of motiondetection circuitry, various types of charging circuitry, and/or thelike.

FIG. 1C shows a perspective view of bottom plate 108. As shown in FIG.1C, sensor(s) 140 may be mounted and/or removably attached to bottomplate 108, for example, by brackets 142 or another type of supportstructure. As further shown in FIG. 1C, sensors 138 may be mountedand/or removably attached to bottom plate 108, for example, by a bracket146 or another type of support structure. As further shown in FIG. 1C,an opening 148 may be formed through bottom plate 108 in which turningmember 130 may be supported and may mechanically connect with linkage128.

FIG. 1D shows a top-down view of middle plate 110. As shown in FIG. 1D,one or more sections of charging element(s) 126 may be positioned onmiddle plate 110. In some implementations, charging element(s) 126 areremovably attached to middle plate 110 by various types of fasteningmechanisms, such as screws, rivets, brackets, clips, and/or the like. Insome implementations, charging element(s) 126 are integrated into middleplate 110.

As further shown in FIG. 1D, various openings may be formed throughmiddle plate 110. For example, openings 150 may be formed through middleplate 110 to permit support members 122 to be positioned throughopenings 150. Moreover, friction rings 124 may be positioned in openings150 such that support members 122 are inserted through friction rings124. As another example, an opening 152 may be formed through middleplate 110 to permit turning member 130 to be positioned through opening152. In some implementations, a plurality of openings 152 may be formedthrough middle plate 110 to permit various configurations of adjustmentmechanisms to be used with middle plate 110 for adjusting the height orvertical position of middle plate 110. A support structure 154 may bepositioned and/or removably attached in opening 152 to support and/orinterface with turning member 130. Support structure 154 may include athreaded opening to interface with the threads of turning member 130such that rotation of turning member 130 causes the threads of turningmember 130 and the threads of support structure 154 to move middle plate110 along a vertical axis or Z axis.

As further shown in FIG. 1D, one or more openings 156 may be formedthrough middle plate 110 to permit sensor(s) 140 to detect motion nearcharging station 100, to generate sensor information associated with ahorizontal position or lateral position of a mobile robot, and/or thelike through middle plate 110. In some implementations, a plurality ofopenings 156 may be formed through middle plate 110 to permit variousconfigurations and/or types of sensor(s) 140 to be used with chargingstation 100.

FIGS. 1E and 1F respectively show perspective views of top plate 112. Asshown in FIGS. 1E and 1F, a plurality of openings may be formed throughtop plate 112. For example, one or more openings 158 may be formedthrough top plate 112 through which charging element(s) 126 may extendand retract through top plate 112. Opening(s) 158 may be located in acharging region 160 of charging station 100 and/or of top plate 112.Charging region 160 may be a region in which the transfer of electricalcharge or electrical current between charging element(s) 126 and amobile robot primarily occurs. As another example, one or more openings162 may be formed through top plate 112 to permit sensor(s) 140 todetect motion near charging station 100, to generate sensor informationassociated with a horizontal position or lateral position of a mobilerobot, and/or the like through top plate 112. In some implementations, aplurality of openings 162 may be formed through top plate 112 to permitvarious configurations and/or types of sensor(s) 140 to be used withcharging station 100. In some implementations, the quantity of openings156 and the quantity of openings 162 may be the same quantity ofopenings. In some implementations, the quantity of openings 156 and thequantity of openings 162 may be different quantities of openings.

Moreover, FIGS. 1E and 1F respectively show a stored configuration ofcharging station 100 and a charging configuration of charging station100. As shown in FIG. 1E, in the stored configuration, chargingelement(s) 126 are retracted through openings 158 in top plate 112 suchthat charging element(s) 126 are positioned even with or below topsurface 116 of top plate 112 (and thus, even with or below top surface114 of floor 102). The stored position may correspond to a height orvertical position of middle plate 110 detected based on sensorinformation generated by sensor 138 c. As shown in FIG. 1F, in thecharging configuration, at least a portion of charging element(s) 126are extended through openings 158 in top plate 112 and are above topsurface 116 of top plate 112 (and thus, above top surface 114 of floor102). The charging position may correspond to a height or verticalposition of middle plate 110 detected based on sensor informationgenerated by sensor 138 b.

FIG. 1G shows the various electrical and electromechanical componentsincluded in controller housing 144. As shown in FIG. 1G, chargingstation 100 may include a controller 164, motion detection circuitry166, charging circuitry 168, and/or one or more other electrical andelectromechanical components. As shown in FIG. 1G, controller 164 maycommunicate with various components of charging station 100, includingmotor 118, sensors 138, sensor(s) 140, motion detection circuitry 166,charging circuitry 168, and/or the like.

Controller 164 may include a programmable logic controller (PLC), amicrocontroller, and/or another type of electronic controller capable ofcommunicating with various components of charging station 100, capableof receiving, generating, and processing electronic information, capableof transmitting instructions and/or causing the various components ofcharging station 100 to perform various types of actions, and/or thelike. For example, controller 164 may communicate with motor 118 tocause motor 118 to activate and deactivate to adjust the height orvertical position of middle plate 110. As another example, controller164 may communicate with sensors 138 to receive sensor informationassociated with the height or vertical position of middle plate 110 andmay cause motor 118 to activate or deactivate based on the sensorinformation. As another example, controller 164 may communicate withsensor(s) 140 to receive sensor information associated with detecting amobile robot near charging station 100 (e.g., near charging region 160of top plate 112), to receive sensor information associated with aposition of the mobile robot relative to charging station 100 (e.g.,relative to charging region 160 of top plate 112), and/or the like, andmay cause motor 118 to activate or deactivate based on the sensorinformation.

As another example, controller 164 may communicate with motion detectioncircuitry 166 to receive an indication that a mobile robot has beendetected near charging station 100 (e.g., near charging region 160 oftop plate 112). For example, motion detection circuitry 166 may includea motion detection relay that activates or energizes a motion detectioncircuit included in motion detection circuitry 166. The motion detectionrelay may activate or energize the motion detection circuit based onreceiving, from sensor(s) 140, an indication that the mobile robot hasbeen detected near charging station 100 (e.g., near charging region 160of top plate 112). The indication may be a change in voltage that closesor opens the motion detection relay, a change in current that opens orcloses the motion detection relay, and/or the like. Closing or openingthe motion detection relay may cause the motion detection circuit to beactivated or energized. The controller 164 may determine that the motiondetection circuit has been activated or energized and may determine thatthe mobile robot has been detected near charging station 100 (e.g., nearcharging region 160 of top plate 112) based on the motion detectioncircuit being activated or energized. In these cases, controller 164 maycommunicate with sensor(s) 140, based on determining that the mobilerobot has been detected near charging station 100 (e.g., near chargingregion 160 of top plate 112), to receive sensor information associatedwith the position of the mobile robot relative to charging station 100(e.g., relative to charging region 160 of top plate 112).

As another example, controller 164 may communicate with chargingcircuitry 168 to cause the mobile robot to be charged by chargingstation 100. For example, charging circuitry 168 may include a chargingrelay that activates or energizes a charging circuit included incharging circuitry 168. Controller 164 may cause the charging relay tobe opened or closed based on the sensor information received fromsensor(s) 138. For example, controller 164 may determine, based on thesensor information, that middle plate 110 (and thus, charging element(s)126) is in the charging position. Controller 164 may cause, based ondetermining that middle plate 110 is in the charging position, thecharging relay to be opened or closed to activate the charging circuitto cause the mobile robot to be charged.

As indicated above, FIGS. 1A-1G are provided as one or more examples.Other examples may differ from what is described with regard to FIGS.1A-1G.

FIGS. 2A-2G are diagrams of one or more example implementations 200described herein. Example implementation(s) 200 illustrate varioustechniques and/or actions for charging a battery of a mobile robot 202using charging station 100. In some implementations, the varioustechniques and/or actions described in connection with exampleimplementation(s) 200 may be used to charge other types of mobiledevices that operate on battery power.

As shown in FIG. 2A, and by reference number 204, charging station 100may monitor for a mobile robot. In some implementations, chargingstation 100 monitors for a mobile robot (e.g., mobile robot 202) usingvarious components of charging station 100, such as sensor(s) 140,controller 164, motion detection circuitry 166, and/or the like. Forexample, sensor(s) 140 may include one or more reflective fiber sensors.A reflective fiber sensor (of sensor 140) may emit light (e.g., visiblelight, infrared light, and/or the like) and may measure an amount ofreflected light received at the reflective fiber sensor.

Accordingly, mobile robot 202 may be equipped with one or morereflectors 206 at or near the bottom of mobile robot 202 configured toreflect the light emitted from sensor(s) 140. A sensor 140 may generatea voltage, an electrical current, or another type of sensor informationcorresponding to the amount of reflected light received at the sensor140. The sensor 140 may provide the voltage, the electrical current, oranother type of sensor information to controller 164 and/or motiondetection circuitry 166. In some implementations, controller 164 detectsthe presence of mobile robot 202 near charging station 100 based ondetermining that a voltage provided by at least one sensor 140 satisfiesa threshold voltage, based on determining that an electrical currentprovided by at least one sensor 140 satisfies a threshold electricalcurrent, and/or the like.

In some implementations, controller 164 detects the presence of mobilerobot 202 near charging station 100 based on activation or energizationof a motion detection circuit of motion detection circuitry 166. Forexample, sensor(s) 140 may provide the voltage, the electrical current,or another type of sensor information to a motion detection relay ofmotion detection circuitry 166. The motion detection relay may open orclose based on the voltage satisfying a threshold voltage to open orclose the motion detection relay, based on the electrical currentsatisfying a threshold voltage to open or close the motion detectionrelay, and/or the like. Opening or closing of the motion detection relaymay activate or energize the motion detection circuit, which indicatesto controller 164 the presence of mobile robot 202 near charging station100.

As shown in FIG. 2B, and by reference number 208, charging station 100may determine that a mobile robot (e.g., mobile robot 202) is positionedover charging region 160 of top plate 112 of charging station 100.Charging station 100 may use various components to determine that mobilerobot 202 is positioned over charging region 160, such as sensor(s) 140,controller 164, and/or the like. For example, mobile robot 202 maytravel along floor 102 and over charging station 100 (e.g., over topplate 112). Charging station 100 may be mounted under floor 102 suchthat top surface 114 of floor 102 and top surface 116 of top plate 112are substantially even or flush, thereby permitting mobile robot 202 totravel over top plate 112. Sensor(s) 140 may include a plurality ofsensors, where each sensor is positioned and/or configured to generatesensor information based on reflected light from a respective reflector206 on mobile robot 202. The sensors 140 may be positioned aroundcharging region 160 such that, when mobile robot 202 is in a position tobe charged over charging region 160, controller 164 may determine that athreshold amount of reflected light is detected at all of the sensors140. Accordingly, if controller 164 determines that a threshold amountof reflected light is detected at all of the sensors 140, controller 164may determine that mobile robot 202 is positioned over charging region160 for charging by charging station 100. In some implementations, ifcontroller 164 determines that mobile robot 202 is not positioned overcharging region 160 but within a threshold range (e.g., an X-axis rangeand/or a Y-axis range) of being positioned over charging region 160,controller 164 may cause the position of charging station 100 to beadjusted (e.g., by sliding charging station 100 along support members106) such that mobile robot 202 is positioned over charging region 160

As shown in FIG. 2C, and by reference number 210, charging station 100may cause charging element(s) 126 to extend to a charging position forcharging mobile robot 202. Charging station 100 may cause chargingelement(s) 126 to extend to the charging position based on determiningthat mobile robot 202 is positioned over charging region 160 forcharging. Charging station 100 may use various components to causecharging element(s) 126 to extend to the charging position, such asmotor 118, sensors 138, turning member 130, controller 164, and/or thelike. For example, controller 164 may receive, from sensor 138 c, sensorinformation indicating a position of middle plate 110 on which chargingelement(s) 126 are positioned. The sensor information may indicate thatmiddle plate 110 (and thus, charging element(s) 126) is in a storedposition, in which charging element(s) 126 are positioned even with orbelow top surface 116 of top plate 112. Accordingly, controller 164 maytransmit a signal or instruction to motor 118 to activate motor 118.Motor 118 may cause, though linkage 128, turning member 130 to rotate ina direction that causes the height or vertical position of middle plate110 to increase, thereby causing middle plate 110 (and thus, chargingelement(s) 126) to transition from the stored position to a chargingposition.

As shown in FIG. 2D, and by reference number 212, charging station 100may determine that middle plate 110 (and thus, charging element(s) 126)is in the charging position. Charging station 100 may use variouscomponents to determine that middle plate 110 (and thus, chargingelement(s) 126) is in the charging position, such as sensors 138,controller 164, and/or the like. Controller 164 may receive, from sensor138 b, sensor information indicating that middle plate 110 (and thus,charging element(s) 126) has reached the charging position. In thecharging position, at least a portion of charging element(s) 126 extendthrough openings 158 in top plate 112 such that the portion of chargingelement(s) 126 extend above top surface 116 of top plate 112 and topsurface 114 of floor 102. Moreover, in the charging position, at least aportion of charging element(s) 126 contact charging element(s) of mobilerobot 202 such that an electrical charge and/or an electrical currentmay be transferred between charging element(s) 126 and the chargingelement(s) of mobile robot 202. Controller 164 may cause, based onreceiving the sensor information indicating that middle plate 110 (andthus, charging element(s) 126) has reached the charging position, motor118 to deactivate and to cease causing turning member 130 to increasethe height or vertical position of middle plate 110.

As shown in FIG. 2E, and by reference number 214, charging station 100may charge mobile robot 202. Charging station 100 may charge mobilerobot 202 by causing an electrical charge or an electrical current to betransferred from charging element(s) 126 to the battery of mobile robot202 through the charging element(s) of mobile robot 202. Chargingstation 100 may use various components to charge mobile robot 202,including charging element(s) 126, controller 164, charging circuitry168, and/or the like. For example, mobile robot 202 may communicate withcontroller 164 through a communication interface of controller 164 toinitiate charging. In some implementations, mobile robot 202 mayinitiate charging by transmitting, to controller 164, an instruction tocause mobile robot 202 to be charged.

In some implementations, a communication path is established betweencontroller 164 and mobile robot 202 when mobile robot 202 is positionedover charging region 160. For example, charging station 100 may includea communication connector that connects with a communication connectorof mobile robot 202 when charging element(s) 126 extend to the chargingposition. In these cases, controller 164 and mobile robot 202 maycommunicate via the communication path. In some implementations,controller 164 and mobile robot 202 communicate wirelessly bytransmitting wireless signals via a wireless communication channel.

Controller 164 may begin the charging of mobile robot 202 by activatingor energizing a charging circuit of charging circuitry 168. In someimplementations, controller 164 may activate or energize the chargingcircuit based on receiving the instruction from mobile robot 202.Controller 164 may activate or energize the charging circuit by closingor opening a charging relay of charging circuitry 168. The closing oropening of the charging relay may cause the charging circuit to beactivate, which may cause electrical charge or electrical current toflow from charging element(s) 126 to the battery of mobile robot 202through the charging element(s) of mobile robot 202.

As shown in FIG. 2F, and by reference number 216, charging station 100may determine that charging of mobile robot 202 is complete. In thesecases, charging station 100 may stop charging mobile robot 202 based ondetermining that charging of mobile robot 202 is complete. Chargingstation 100 may determine that charging of mobile robot 202 is completeand may cause charging station 100 to stop charging mobile robot 202using various components, such as controller 164 and/or the like. Insome implementations, controller 164 may determine that charging ofmobile robot 202 is complete based on expiration of a charging timer,which may expire when or prior to the battery of mobile robot 202 beingfully recharged. In some implementations, controller 164 may determinethat charging of mobile robot 202 is complete based on receiving aninstruction to stop charging, which may be received when or prior to thebattery of mobile robot 202 being fully recharged.

In some implementations, controller 164 may communicate with mobilerobot 202 to receive information identifying a charge level of thebattery of mobile robot 202 and a threshold charge level for thebattery. Accordingly, controller 164 may determine that charging ofmobile robot 202 is complete when the charge level of the batterysatisfies the threshold charge level. The charge level and the thresholdcharge level may be indicated by respective voltages, respectiveelectrical currents, and/or other indicators. Controller 164 may causecharging station 100 to stop charging mobile robot 202 by deactivatingor deenergizing the charging circuit. For example, controller 164 maydeactivate or deenergize the charging circuit by opening or closing thecharging relay.

As shown in FIG. 2G, and by reference number 218, charging station 100may cause charging element(s) 126 to retract to the stored position forstorage after charging mobile robot 202. Charging station 100 may causecharging element(s) 126 to retract to the stored position based ondetermining that charging of mobile robot 202 is complete. Chargingstation 100 may use various components to cause charging element(s) 126to retract to the stored position, such as motor 118, sensors 138,turning member 130, controller 164, and/or the like. For example,controller 164 may receive, from sensor 138 b, sensor informationindicating a position of middle plate 110. The sensor information mayindicate that middle plate 110 (and thus, charging element(s) 126) is inthe charging position. Accordingly, controller 164 may transmit a signalor instruction to motor 118 to activate motor 118. Motor 118 may cause,though linkage 128, turning member 130 to rotate in a direction thatcauses the height or vertical position of middle plate to decrease,thereby causing middle plate 110 (and thus, charging element(s) 126) totransition from the charging position to the stored position.

Charging station 100 may determine that middle plate 110 (and thus,charging element(s) 126) are in the stored position. Charging station100 may use various components to determine that middle plate 110 (andthus, charging element(s) 126) is in the stored position, such assensors 138, controller 164, and/or the like. Controller 164 mayreceive, from sensor 138 c, sensor information indicating that middleplate 110 (and thus, charging element(s) 126) has reached the storedposition. Controller 164 may cause, based on receiving the sensorinformation indicating that middle plate 110 (and thus, chargingelement(s) 126) has reached the stored position, motor 118 to deactivateand to cease causing turning member 130 to decrease the height orvertical position of middle plate 110.

As indicated above, FIGS. 2A-2G are provided as one or more examples.Other examples may differ from what is described with regard to FIGS.2A-2G.

FIG. 3 is a diagram of an example environment 300 in which systemsand/or methods described herein may be implemented. As shown in FIG. 3,environment 300 may include a clean room 302 in which a mobile robot 304travels along a path of travel to transport wafers, dies, and/or otheritems throughout clean room 302. Mobile robot 304 may transport wafers,dies, and/or other items between one or more loading ports 306, one ormore wafer racks 308, and/or one or more other locations in clean room302. Moreover, mobile robot 304 may be charged by one or more chargingstations 310 in clean room 302.

Clean room 302 may be a clean room for manufacturing wafers, varioustypes of semiconductor devices (e.g., transistors, memory devices,processors, analog devices (e.g., sensors, signal processing devices,and/or the like), semiconductor light emitting diodes (LEDs),semiconductor lasers, and/or the like, and/or components thereof.

Mobile robot 304 may be an automated mobile device (e.g., mobile robot202) that is capable of transporting wafers, dies, and/or other itemsthroughout clean room 302. For example, mobile robot 304 may be abattery-powered robot, a battery-powered motorized cart, a mobile and/orbattery-powered tram or trolley, or another type of battery-powereddevice. In some implementations, mobile robot 304 travels along a pathof travel between various locations in clean room 302, which may includestops at locations including loading port(s) 306, wafer rack(s) 308,and/or the like. In some implementations, the path of travel of mobilerobot 304 is semi-autonomous or configured to transport wafers, dies,and/or other items as needed or at particular times and in a particularorder to support the various semiconductor processes carried out inclean room 302. In some implementations, mobile robot 304 is capable oftransporting wafer containers (e.g., containers capable of holding waferlots), die containers (e.g., containers capable of holding die lots),individual wafers, and/or the like.

Load port 306 includes a container dock, a wafer port, a die port, astaging location, and/or the like associated with a semiconductorprocessing device or system. For example, load port 306 may be a wafercontainer dock, of a semiconductor processing device, on which a wafercontainer is placed such that wafers in the wafer container can beloaded from the wafer container into the semiconductor processing devicefor processing. The semiconductor processing device or system may be alithography device (e.g., a spin coating device, an exposure device, adeveloper device, and/or the like), a deposition device (e.g., achemical vapor deposition device, a physical vapor deposition device,and/or the like), an etching device, or another type of semiconductorprocessing device. Wafer rack 308 includes a rack, a shelf, a storagecabinet, or another structure configured to hold wafers, dies, wafercontainers, die containers, and/or the like.

Charging station 310 includes a charging station (e.g., charging station100) capable of being mounted under a floor of clean room 302 andcapable of charging mobile robot 304. For example, charging station 310may detect mobile robot 304 near charging station 310, may determinewhether mobile robot 304 is positioned over a charging region ofcharging station 310, may cause one or more charging elements ofcharging station 310 to transition to a charging position in which atleast a portion of the one or more charging elements extend above thefloor of clean room 302, may activate charge circuitry to charge themobile robot while the one or more charging elements are in the chargingposition, and/or the like.

The number and arrangement of devices shown in FIG. 3 are provided asone or more examples. In practice, there may be additional devices,fewer devices, different devices, or differently arranged devices thanthose shown in FIG. 3. Furthermore, two or more devices shown in FIG. 3may be implemented within a single device, or a single device shown inFIG. 3 may be implemented as multiple, distributed devices.Additionally, or alternatively, a set of devices (e.g., one or moredevices) of environment 300 may perform one or more functions describedas being performed by another set of devices of environment 300.

FIG. 4 is a diagram of example components of a device 400. Device 400may correspond to controller 164, mobile robot 202, mobile robot 304,and/or the like. In some implementations, controller 164, mobile robot202, mobile robot 304, and/or the like may include one or more devices400 and/or one or more components of device 400. As shown in FIG. 4,device 400 may include a bus 410, a processor 420, a memory 430, astorage component 440, an input component 450, an output component 460,and a communication interface 470.

Bus 410 includes a component that permits communication among multiplecomponents of device 400. Processor 420 is implemented in hardware,firmware, and/or a combination of hardware and software. Processor 420is a central processing unit (CPU), a graphics processing unit (GPU), anaccelerated processing unit (APU), a microprocessor, a microcontroller,a digital signal processor (DSP), a field-programmable gate array(FPGA), an application-specific integrated circuit (ASIC), or anothertype of processing component. In some implementations, processor 420includes one or more processors capable of being programmed to perform afunction. Memory 430 includes a random access memory (RAM), a read onlymemory (ROM), and/or another type of dynamic or static storage device(e.g., a flash memory, a magnetic memory, and/or an optical memory) thatstores information and/or instructions for use by processor 420.

Storage component 440 stores information and/or software related to theoperation and use of device 400. For example, storage component 440 mayinclude a hard disk (e.g., a magnetic disk, an optical disk, and/or amagneto-optic disk), a solid state drive (SSD), a compact disc (CD), adigital versatile disc (DVD), a floppy disk, a cartridge, a magnetictape, and/or another type of non-transitory computer-readable medium,along with a corresponding drive.

Input component 450 includes a component that permits device 400 toreceive information, such as via user input (e.g., a touch screendisplay, a keyboard, a keypad, a mouse, a button, a switch, and/or amicrophone). Additionally, or alternatively, input component 450 mayinclude a component for determining location (e.g., a global positioningsystem (GPS) component) and/or a sensor (e.g., an accelerometer, agyroscope, an actuator, another type of positional or environmentalsensor, and/or the like). Output component 460 includes a component thatprovides output information from device 400 (via, e.g., a display, aspeaker, a haptic feedback component, an audio or visual indicator,and/or the like).

Communication interface 470 includes a transceiver-like component (e.g.,a transceiver, a separate receiver, a separate transmitter, and/or thelike) that enables device 400 to communicate with other devices, such asvia a wired connection, a wireless connection, or a combination of wiredand wireless connections. Communication interface 470 may permit device400 to receive information from another device and/or provideinformation to another device. For example, communication interface 470may include an Ethernet interface, an optical interface, a coaxialinterface, an infrared interface, a radio frequency (RF) interface, auniversal serial bus (USB) interface, a Wi-Fi interface, a cellularnetwork interface, and/or the like.

Device 400 may perform one or more processes described herein. Device400 may perform these processes based on processor 420 executingsoftware instructions stored by a non-transitory computer-readablemedium, such as memory 430 and/or storage component 440. As used herein,the term “computer-readable medium” refers to a non-transitory memorydevice. A memory device includes memory space within a single physicalstorage device or memory space spread across multiple physical storagedevices.

Software instructions may be read into memory 430 and/or storagecomponent 440 from another computer-readable medium or from anotherdevice via communication interface 470. When executed, softwareinstructions stored in memory 430 and/or storage component 440 may causeprocessor 420 to perform one or more processes described herein.Additionally, or alternatively, hardware circuitry may be used in placeof or in combination with software instructions to perform one or moreprocesses described herein. Thus, implementations described herein arenot limited to any specific combination of hardware circuitry andsoftware.

The number and arrangement of components shown in FIG. 4 are provided asan example. In practice, device 400 may include additional components,fewer components, different components, or differently arrangedcomponents than those shown in FIG. 4. Additionally, or alternatively, aset of components (e.g., one or more components) of device 400 mayperform one or more functions described as being performed by anotherset of components of device 400.

FIG. 5 is a flow chart of an example process 500 associated withcharging a mobile robot. In some implementations, one or more processblocks of FIG. 5 may be performed by a controller of a charging station(e.g., controller 164 of charging station 100, a controller of chargingstation 310, device 400, and/or the like).

As shown in FIG. 5, process 500 may include receiving, from one or morefirst sensors, sensor information associated with a position of a mobilerobot to be charged by an under-floor charging station associated withthe device (block 510). For example, the controller (e.g., usingprocessor 420, memory 430, storage component 440, input component 450,output component 460, communication interface 470, and/or the like) mayreceive, from one or more first sensors (e.g., one or more sensors 140),sensor information associated with a position of a mobile robot (e.g.,mobile robot 202, mobile robot 304, and/or the like) to be charged by anunder-floor charging station (e.g., charging station 100, chargingstation 310, and/or the like) associated with the device, as describedabove.

As further shown in FIG. 5, process 500 may include determining, basedon the sensor information associated with the position of the mobilerobot, that the mobile robot is positioned over a charging region of theunder-floor charging station (block 520). For example, the controller(e.g., using processor 420, memory 430, storage component 440, inputcomponent 450, output component 460, communication interface 470, and/orthe like) may determine, based on the sensor information associated withthe position of the mobile robot, that the mobile robot is positionedover a charging region (e.g., charging region 160) of the under-floorcharging station, as described above.

As further shown in FIG. 5, process 500 may include causing, based ondetermining that the mobile robot is positioned over the chargingregion, one or more charging elements to extend at least partiallythrough a top plate of the under-floor charging station to a chargingposition (block 530). For example, the controller (e.g., using processor420, memory 430, storage component 440, input component 450, outputcomponent 460, communication interface 470, and/or the like) may cause,based on determining that the mobile robot is positioned over thecharging region, one or more charging elements (e.g., one or morecharging elements 126) to extend at least partially through a top plate(e.g., top plate 112) of the under-floor charging station to a chargingposition, as described above.

As further shown in FIG. 5, process 500 may include causing theunder-floor charging station to charge the mobile robot while the one ormore or more charging elements are in the charging position (block 540).For example, the controller (e.g., using processor 420, memory 430,storage component 440, input component 450, output component 460,communication interface 470, and/or the like) may cause the under-floorcharging station to charge the mobile robot while the one or more ormore charging elements are in the charging position, as described above.

Process 500 may include additional implementations, such as any singleimplementation or any combination of implementations described belowand/or in connection with one or more other processes describedelsewhere herein.

In a first implementation, process 500 includes causing the one or morecharging elements to move from a stored position toward the chargingposition, determining, based on sensor information received from one ormore second sensors (e.g. one or more sensors 138), that the one or morecharging elements are in the charging position, and causing the one ormore charging elements to stop moving based on determining that the oneor more charging elements are in the charging position. In a secondimplementation, alone or in combination with the first implementation,process 500 includes determining that charging of the mobile robot iscomplete, and causing, based on determining that charging of the mobilerobot is complete, the one or more charging elements to retract throughthe top plate to a stored position in which the one or more is chargingelements are positioned below a top surface (e.g., top surface 116) ofthe top plate.

In a third implementation, alone or in combination with one or more ofthe first and second implementations, process 500 includes causing theone or more charging elements to move from the charging position towardthe stored position, determining, based on sensor information receivedfrom one or more second sensors (e.g., one or more sensors 138), thatthe one or more charging elements are in the stored position, andcausing the one or more charging elements to stop moving based ondetermining that the one or more charging elements are in the storedposition.

Although FIG. 5 shows example blocks of process 500, in someimplementations, process 500 may include additional blocks, fewerblocks, different blocks, or differently arranged blocks than thosedepicted in FIG. 5. Additionally, or alternatively, two or more of theblocks of process 500 may be performed in parallel.

FIG. 6 is a flow chart of an example process 600 associated withcharging a mobile robot. In some implementations, one or more processblocks of FIG. 6 may be performed by a controller of a charging station(e.g., controller 164 of charging station 100, a controller of chargingstation 310, device 400, and/or the like).

As shown in FIG. 6, process 600 may include detecting, based on motiondetection circuitry, a mobile robot near an under-floor charging station(block 610). For example, the controller (e.g., using processor 420,memory 430, storage component 440, input component 450, output component460, communication interface 470, and/or the like) may detect, based onmotion detection circuitry (e.g., motion detection circuitry 166), amobile robot (e.g., mobile robot 202, mobile robot 304, and/or the like)near an under-floor charging station (e.g., charging station 100,charging station 310, and/or the like), as described above.

As further shown in FIG. 6, process 600 may include determining, basedon detecting the mobile robot, whether the mobile robot is positionedover a charging region of the under-floor charging station (block 620).For example, the controller (e.g., using processor 420, memory 430,storage component 440, input component 450, output component 460,communication interface 470, and/or the like) may determine, based ondetecting the mobile robot, whether the mobile robot is positioned overa charging region (e.g., charging region 160) of the under-floorcharging station, as described above.

As further shown in FIG. 6, process 600 may include causing, based ondetermining that the mobile robot is positioned over the chargingregion, one or more charging elements of the under-floor chargingstation to transition to a charging position in which at least a portionof the one or more charging elements extend above a floor on which themobile robot travels (block 630). For example, the controller (e.g.,using processor 420, memory 430, storage component 440, input component450, output component 460, communication interface 470, and/or the like)may cause, based on determining that the mobile robot is positioned overthe charging region, one or more charging elements (e.g., chargingelements 126) of the under-floor charging station to transition to acharging position in which at least a portion of the one or morecharging elements extend above a floor (e.g., floor 102) on which themobile robot travels, as described above.

As further shown in FIG. 6, process 600 may include determining whetherthe one or more charging elements are in the charging position (block640). For example, the controller (e.g., using processor 420, memory430, storage component 440, input component 450, output component 460,communication interface 470, and/or the like) may determine whether theone or more charging elements are in the charging position, as describedabove.

As further shown in FIG. 6, process 600 may include causing, based ondetermining that the one or more charging elements are in the chargingposition, charging circuitry to activate to charge the mobile robot(block 650). For example, the controller (e.g., using processor 420,memory 430, storage component 440, input component 450, output component460, communication interface 470, and/or the like) may cause, based ondetermining that the one or more charging elements are in the chargingposition, charging circuitry (e.g., charging circuitry 168) to activateto charge the mobile robot, as described above.

Process 600 may include additional implementations, such as any singleimplementation or any combination of implementations described belowand/or in connection with one or more other processes describedelsewhere herein.

In a first implementation, determining whether the mobile robot ispositioned over the charging region includes receiving, from one or moresensors (e.g., one or more sensors 140), sensor information associatedwith a position of the mobile robot, and determining whether the mobilerobot is positioned over the charging region based on the sensorinformation associated with the position of the mobile robot. In asecond implementation, alone or in combination with the firstimplementation, the one or more sensors are one or more reflective fibersensors, and the sensor information associated with the position of themobile robot indicates whether a reflection from one or more reflectors(e.g., one or more reflectors 206) associated with the mobile robot isreceived by the one or more reflective fiber sensors.

In a third implementation, alone or in combination with one or more ofthe first and second implementations, process 600 includes determining,after a threshold time period from detecting the mobile robot, that themobile robot is not positioned over the charging region, and triggeringan alarm based on determining that the mobile robot is not positionedover the charging region. In a fourth implementation, alone or incombination with one or more of the first through third implementations,the one or more sensors are one or more reflective fiber sensors, anddetermining that the mobile robot is not positioned over the chargingregion includes determining that the mobile robot is not positioned overthe charging region based on the sensor information associated with theposition of the mobile robot indicating that a reflection from at leastone reflector associated with the mobile robot is not received by atleast one of the one or more reflective fiber sensors.

In a fifth implementation, alone or in combination with one or more ofthe first through fourth implementations, causing the charging circuitryto activate includes causing, based on receiving the instruction, acharging relay to activate a charging circuit to charge the mobilerobot. In a sixth implementation, alone or in combination with one ormore of the first through fifth implementations, determining whether theone or more charging elements are in the charging position includesreceiving, from a sensor associated with the charging position (e.g.,sensor 138 b), sensor information associated with a position of a plateon which the one or more charging elements are supported, anddetermining whether the one or more charging elements are in thecharging position based on the sensor information associated with theposition of the plate.

In a seventh implementation, alone or in combination with one or more ofthe first through sixth implementations, process 600 includes causingthe one or more charging elements to transition from the chargingposition to a stored position; receiving, from a sensor associated withthe stored position (e.g., sensor 138 c), other sensor informationassociated with the position of the plate; and determining whether theone or more charging elements are in the stored position based on theother sensor information associated with the position of the plate.

Although FIG. 6 shows example blocks of process 600, in someimplementations, process 600 may include additional blocks, fewerblocks, different blocks, or differently arranged blocks than thosedepicted in FIG. 6. Additionally, or alternatively, two or more of theblocks of process 600 may be performed in parallel.

FIG. 7 is a flowchart of an example process 700 for charging a mobilerobot. In some implementations, one or more process blocks of FIG. 7 maybe performed by a controller of a charging station (e.g., controller 164of charging station 100, a controller of charging station 310, device400, and/or the like).

As shown in FIG. 7, process 700 may include confirming a mobile robotposition based on sensor data (block 710). For example, the controller(e.g., using processor 420, memory 430, storage component 440, inputcomponent 450, output component 460, communication interface 470, and/orthe like) may confirm a mobile robot position based on sensor data, asdescribed above. In some implementations, the sensor data may indicatean X axis position of a mobile robot (e.g., mobile robot 202, mobilerobot 304, and/or the like), a Y axis position of the mobile robot,and/or the like. In some implementations, the sensor data may begenerated by one or more X axis and Y axis sensors (e.g., sensor(s)140).

As further shown in FIG. 7, if the mobile robot position cannot beconfirmed (block 710-No), process 700 may include triggering an alarm(block 720). For example, the controller (e.g., using processor 420,memory 430, storage component 440, input component 450, output component460, communication interface 470, and/or the like) may trigger an alarm,as described above. In some implementations, the alarm may be an audiblealarm (e.g., a siren, a buzzer, a voice alarm, and/or the like), avisual alarm (e.g., a light indicator, an indicator on an electronicdisplay, and/or the like), or another type of alarm to indicate that themobile robot position cannot be confirmed. In some implementations, thealarm may be triggered if the mobile robot position cannot be confirmedafter a particular amount of time from the mobile robot being detectednear the charging station.

As further shown in FIG. 7, if the mobile robot position is confirmed(block 710-Yes), process 700 may include extending charging elements ofthe charging station (block 730). For example, the controller (e.g.,using processor 420, memory 430, storage component 440, input component450, output component 460, communication interface 470, and/or the like)may extend charging elements of the charging station, as describedabove. In some implementations, the charging elements (e.g., chargingelements 126) may be in a stored position, and may extend from thestored position to a charging position. In the charging position, atleast a portion of the charging elements may extend above a top surface(e.g., top surface 114) of a floor (e.g., floor 102).

As further shown in FIG. 7, process 700 may include confirming aposition of the charging elements (block 740). For example, thecontroller (e.g., using processor 420, memory 430, storage component440, input component 450, output component 460, communication interface470, and/or the like) may confirm a position of the charging elements,as described above. In some implementations, the controller may confirmthe position of the charging elements based on Z axis sensor data. The Zaxis sensor data my indicate a Z axis position of the charging elementsor a plate (e.g., middle plate 110) on which the charging elements arepositioned. In some implementations, the sensor data may be generated byone or more Z axis sensors (e.g., sensors 138).

As further shown in FIG. 7, if the position of the charging elementscannot be confirmed (block 740-No), process 700 may include triggeringan alarm (block 750). For example, the controller (e.g., using processor420, memory 430, storage component 440, input component 450, outputcomponent 460, communication interface 470, and/or the like) may triggeran alarm, as described above. In some implementations, the alarm may bean audible alarm (e.g., a siren, a buzzer, a voice alarm, and/or thelike), a visual alarm (e.g., a light indicator, an indicator on anelectronic display, and/or the like), or another type of alarm toindicate that the charging elements cannot be confirmed. In someimplementations, the alarm may be triggered if the position of thecharging elements is incorrect or cannot be confirmed after initialmovement of the charging elements from the storage position.

As further shown in FIG. 7, if the position of the charging elements isconfirmed (block 740-Yes), process 700 may include turning on a chargingrelay (block 760). For example, the controller (e.g., using processor420, memory 430, storage component 440, input component 450, outputcomponent 460, communication interface 470, and/or the like) may turn ona charging relay, as described above. In some implementations, thecharging relay maybe included as part of charging circuitry (e.g.,charging circuitry 168) of the charging station. Turning on the chargingrelay may activate a charge circuit included in the charging circuitry.

As further shown in FIG. 7, process 700 may include communicating withthe mobile robot (block 770). For example, the controller (e.g., usingprocessor 420, memory 430, storage component 440, input component 450,output component 460, communication interface 470, and/or the like) maycommunicate with the mobile robot, as described above. In someimplementations, the mobile robot may initiate communication with thecharging station to initiate charging of the mobile robot.

As further shown in FIG. 7, process 700 may include charging the mobilerobot (block 780). For example, the controller (e.g., using processor420, memory 430, storage component 440, input component 450, outputcomponent 460, communication interface 470, and/or the like) may chargethe mobile robot, as described above. In some implementations, thecontroller may cause the charging circuit to charge the mobile robotbased on the mobile robot initiating communication with the chargingstation. In some implementations, the controller may cause the chargingcircuit to cause current to flow through the charging elements and tocharging elements of the mobile robot to charge the mobile robot.

Process 700 may include additional implementations, such as any singleimplementation or any combination of implementations described inconnection with one or more other processes described elsewhere herein.Although FIG. 7 shows example blocks of process 700, in someimplementations, process 700 may include additional blocks, fewerblocks, different blocks, or differently arranged blocks than thosedepicted in FIG. 7. Additionally, or alternatively, two or more of theblocks of process 700 may be performed in parallel.

In this way, under-floor charging station (e.g., under-floor chargingstation 100, under-floor charging station 310, and/or the like) can bemounted beneath a floor (e.g., floor 102) such as a raised clean roomfloor or another type of floor in which a top plate (e.g., top plate112) of the under-floor charging station is substantially flush with atop surface (e.g., top surface 114) of the floor without touching theground. Openings (e.g., openings 158) in the top plate allow chargingelements (e.g., charging elements 126) to extend when in use to charge amobile robot (e.g., mobile robot 202, mobile robot 304, and/or thelike), and to retract under the floor when not in use. The retractablecharging elements of the under-floor charging station prevent trippinghazards and allow the mobile robot to move freely throughout a cleanroom. In particular, the mobile robot can travel over the under-floorcharging station without the under-floor charging station interferingwith the mobile robot's path of travel. This allows the mobile robot totravel in a more direct path, which reduces the complexity inprogramming the path of travel of the mobile robot and allows the pathof travel of the mobile robot to be more optimized. Moreover, becausethe charging elements can be retracted in an unobtrusive position whenthe under-floor charging station is not in use, the under-floor chargingstation is permitted to be positioned in locations in the clean roomthat allow the mobile robot to continue working while charging and/orallow non-stop running of the mobile robot. For example, the under-floorcharging station may be positioned near wafer racks, loading ports ofsemiconductor processing equipment, and/or the like such that the mobilerobot can charge while loading and unloading wafer/die containers.

As described in greater detail above, some implementations describedherein provide a charging station for charging a mobile robot. Thecharging station includes a first plate having one or more openingsthrough the first plate. The charging station includes a second platepositioned below the first plate. The charging station includes one ormore charging elements on the second plate. The charging stationincludes a motor to cause the second plate to move between a firstposition and a second position. In the first position, the one or morecharging elements are at least partially extended through the one ormore openings to charge the mobile robot. In the second position, theone or more charging elements are substantially even with or below a topsurface of the first plate.

As described in greater detail above, some implementations describedherein provide a device. The device includes one or more memories andone or more processors communicatively coupled to the one or morememories. The one or more memories and one or more processors may beconfigured to receive, from one or more first sensors, sensorinformation associated with a position of a mobile robot to be chargedby an under-floor charging station associated with the device. The oneor more memories and one or more processors may be configured todetermine, based on the sensor information associated with the positionof the mobile robot, that the mobile robot is positioned over a chargingregion of the under-floor charging station. The one or more memories andone or more processors may be configured to cause, based on determiningthat the mobile robot is positioned over the charging region, one ormore charging elements to extend at least partially through a top plateof the under-floor charging station to a charging position. The one ormore memories and one or more processors may be configured to cause theunder-floor charging station to charge the mobile robot while the one ormore or more charging elements are in the charging position.

As described in greater detail above, some implementations describedherein provide a method. The method includes detecting, by a controllerand based on motion detection circuitry, a mobile robot near anunder-floor charging station. The method includes determining, by thecontroller and based on detecting the mobile robot, whether the mobilerobot is positioned over a charging region of the under-floor chargingstation. The method includes causing, by the controller and based ondetermining that the mobile robot is positioned over the chargingregion, one or more charging elements of the under-floor chargingstation to transition to a charging position in which at least a portionof the one or more charging elements extend above a floor on which themobile robot travels. The method includes determining, by thecontroller, whether the one or more charging elements are in thecharging position. The method includes causing, by the controller andbased on determining that the one or more charging elements are in thecharging position, charging circuitry to activate to charge the mobilerobot.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A charging station, comprising: a first plate having one or more openings; and one or more charging elements, wherein the charging station is configured to cause the one or more charging elements to transition to a charging position in which at least a portion of the one or more charging elements at least partially extend through the one or more openings of the first plate.
 2. The charging station of claim 1, wherein a top surface of the first plate and a top surface of a floor are substantially even, and wherein the charging station is configured to cause the one or more charging elements to transition from an initial position in which the one or more charging elements are below the top surface of the floor.
 3. The charging station of claim 1, wherein a top surface of the first plate and a top surface of a floor are substantially even, and wherein the charging elements at least partially extend above the top surface of the floor when the charging elements are in the charging position. .
 4. The charging station of claim 1, further comprising: a second plate positioned below the first plate and comprising the one or more charging elements.
 5. The charging station of claim 4, further comprising: one or more sensors for detecting a position of the second plate.
 6. The charging station of claim 4, further comprising: a third plate positioned below the second plate, wherein the second plate is connected to the third plate in a manner that permits a height of the second plate to be adjusted relative to the first plate and the third plate.
 7. The charging station of claim 4, further comprising: a third plate positioned below the second plate; and one or more support members connected to the third plate, wherein the charging station is configured to horizontally translate the first plate, the second plate, and the third plate via the one or more support members.
 8. A device, comprising: one or more memories; and one or more processors, coupled to the one or more memories, to: determine whether a mobile robot is positioned over a charging region of a charging station; cause, based on determining whether the mobile robot is positioned over the charging region, one or more charging elements, associated with a middle plate, to transition to a charging position in which at least a portion of the one or more charging elements at least partially extend through one or more openings of a top plate; and cause the charging station to charge the mobile robot while the one or more or more charging elements are in the charging position.
 9. The device of claim 8, wherein determining whether the mobile robot is positioned over the charging region of the charging station comprises: determining, based on sensor data associated with a sensor of the charging station, that the mobile robot is positioned over the charging region of the charging station.
 10. The device of claim 9, further comprising: receiving light reflected off the mobile robot; and generating the sensor data.
 11. The device of claim 8, wherein determining whether the mobile robot is positioned over the charging region of the charging station comprises: determining that the mobile robot is not positioned over the charging region of the charging station; and sending instructions to the mobile robot to move to a charging location association the charging region.
 12. The device of claim 8, wherein the middle plate is below the top plate in the charging position.
 13. The device of claim 8, wherein the device is the mobile robot.
 14. The device of claim 8, wherein the device is the charging station.
 15. A method, comprising: determining that a mobile robot is positioned over a charging region of a charging station; determining, based on determining that the mobile robot is positioned over the charging station, whether one or more charging elements of the charging station are in a charging position, in which at least in a portion of the one or more charging elements at least partially extend through one or more openings of a first plate of the charging station, or in a non-charging position in which the one or more charging elements do not extend through the one or more opening of the first plate; and selectively causing, based on determining whether the one or more charging elements of the charging station are in the charging state or the non-changing state, the one or more charging elements of the charging station to transition to the charging position or the non-charging position.
 16. The method of claim 15, further comprising: causing, based on determining that the one or more charging elements are in the charging position, charging circuitry of the charging station to charge the mobile robot via the one or more charging elements.
 17. The method of claim 15, further comprising: receiving, from one or more sensors, sensor information associated with a position of the mobile robot, wherein determining that the mobile robot is positioned over the charging region is based on the sensor information.
 18. The method of claim 15, further comprising: determining, after a threshold time period from detecting the mobile robot, that the mobile robot is not positioned over the charging region; and triggering an alarm based on determining that the mobile robot is not positioned over the charging region.
 19. The method of claim 15, wherein determining whether the one or more charging elements are in the charging position or non-charging position comprises: receiving, from a first sensor of the charging station, sensor information associated with a position of a second plate supporting the one or more charging elements; and determining whether the one or more charging elements are in the charging position based on the sensor information associated with the position of the second plate.
 20. The method of claim 15, wherein determining whether the one or more charging elements are in the charging position or non-charging position comprises: receiving, from a second sensor of the charging station, other sensor information associated with a position of a second plate supporting the one or more charging elements; and determining whether the one or more charging elements are in the non-charging position based on the other sensor information associated with the position of the second plate. 